Cubic centimeter per minute (cm³/min)

The cubic centimetre per minute is a unit of volumetric flow rate equal to one cubic centimetre passing a point every minute. Its symbol is cm³/min, and since a cubic centimetre is a millilitre, mL/min means the same thing. It is the standard unit of controlled gas flow in laboratories and in the semiconductor industry.

That industry gave it an abbreviation of its own: sccm, standard cubic centimetres per minute. The word standard matters, because a gas expands and contracts with temperature and pressure, so a volume flow means nothing until the conditions are pinned down. A mass flow controller set to 50 sccm delivers a fixed number of molecules per minute regardless of what the downstream pressure does, which is precisely what a deposition or etching process requires.

A silicon wafer passing through a plasma etcher meets several such controllers at once — argon at a few hundred sccm, a reactive fluorine compound at tens, oxygen at a handful — and the recipe that defines the process is essentially a list of these numbers against time. Repeating a process in another factory means reproducing the same flows.

Chromatography and gas analysis use the unit at the low end. Helium carrier gas through a capillary column runs at one or two cubic centimetres per minute, a flame detector burns hydrogen at thirty and air at three hundred, and a mass spectrometer's inlet is designed around a flow the vacuum pumps can cope with.

Liquids appear here as well, particularly in analytical chemistry and medicine. A high-performance liquid chromatography pump runs at 0.2 to 2 cubic centimetres per minute, and an intravenous infusion of 100 millilitres over an hour is 1.67 cubic centimetres per minute. In both cases the small, steady rate is what allows the result to be reproduced.

Sixty cubic centimetres per minute is one cubic centimetre per second, and a thousand is a litre per minute. So a typical mass flow controller set to 500 sccm is delivering half a litre of gas a minute — about the volume of a soft-drink bottle, which is a helpful way to picture what an invisible gas line is actually carrying.

One cubic centimetre per minute equals one millilitre per minute, about 0.01667 cubic centimetres per second, or 0.001 litres per minute.

Cubic centimeter per minute conversion table